Silicon anodization as a structuring technique : literature review, modeling and experiments 1st ed.

Author

• Ivanov, Alexey

Additional Author(s)

-

Publisher

Wiesbaden: Springer Fachmedien Wiesbaden , 2018

Language

English

ISBN

9783658192389

Series

Subject(s)

• ELECTROLYTIC OXIDATION
• MASS TRANSFER
• NANOTECHNOLOGY

Notes

. .

Abstract

Alexey Ivanov investigates the application of a silicon anodization process as a three-dimensional structuring technique, where silicon is transformed into porous silicon as a sacrificial layer or directly dissolved in electropolishing regime. The work contains a detailed state of the art, experimental studies and modeling of the process for basic shape controlling techniques. Limitations of the developed FEM model with secondary current distribution are discussed. Contents Silicon Anodization: State of the Art Experimental, Characterization and Simulation Methods Microscale Study of Anodization Process Anodization Process as a Structuring Technique: Experiments and Simulation Target Groups Researchers and students of microsystems technology, electrochemistry, microengineering Practitioners in the area of microsystems, silicon processing and electrochemical material processing

Physical Dimension

Number of Page(s)

1 online resource (xxix, 316 p.)

Dimension

-

Other Desc.

ill. (in color.)

Summary / Review / Table of Content

Silicon Anodization: State of the Art --
Experimental, Characterization and Simulation Methods --
Microscale Study of Anodization Process --
Anodization Process as a Structuring Technique: Experiments and Simulation.

Exemplar(s)

#	Accession No.	Call Number	Location	Status
1.	01382/20	541.393 Iva S	Online !	Available