Computational modeling in semiconductor processing

Author

• Meyyappan, M. -ed.

Additional Author(s)

-

Publisher

Boston: Artech House, 1995

Language

English

ISBN

0890067074

Series

The Artech House materials science library

Subject(s)

• PROCESS CONTROL-MATHEMATICAL MODELS
• SEMI CONDUCTOR INDUSTRY
• SEMICONDUCTORS-DESIGN AND CONSTRUCTION-DATA PROCESSING

Notes

-

Abstract

Index: p. 355-363

Physical Dimension

Number of Page(s)

x, 363 p.

Dimension

24 cm

Other Desc.

ill.

Summary / Review / Table of Content

No summary / review / table of content available!

Exemplar(s)

#	Accession No.	Call Number	Location	Status
1.	04121/96	621.381520113 Mey C	-	Available